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Compact EUV & X-Ray Light Sources (EUVXRAY)

Compact EUV & X-Ray Light Sources (EUVXRAY)

12 April 2024 – 14 April 2024 | Hotel Savoyen Vienna, Vienna, Austria

Emerging, compact extreme-ultraviolet and x-ray sources that exhibit high brightness and are small enough to be installed in laboratories at educational and research institutions, manufacturing facilities, hospitals and other suitable sites, will revolutionize scientific and technical disciplines, complementing both existing and future large scale synchrotron radiation and free-electron laser sources.

Applications span a wide range including biomedical, semiconductor manufacturing, fundamental and applied research, environmental engineering, industrial non-destructive testing and screening and defense and security.

The aim of the Compact EUV & X-Ray Light Sources Topical Meeting (EUVXRAY) is to assemble experts in both source technologies and their applications to present and exchange ideas and improve community wide understanding of current and future source capabilities and current and future application needs. The latest results in the development of these sources are presented as well as descriptions of efforts to mature the technology so they meet the requirements needed in order to transition the technology to industrial and medical applications. Topics include the latest development in source technologies and applications in the EUV through hard-ray regime.

The co-location with the High-Intensity Sources and High-Field Phenomena (HILAS) and Mid-infrared Coherent Sources (MCS) Topical Meetings provides a unique opportunity to expand interaction with multidisciplinary groups that share a broad range of interests and goals.
 


Topics
 

Compact EUV & X-Ray Light Sources (EUVXRAY)
  1. EUV Through Hard-X-ray Sources and Components
    • Laser and discharge produced plasma sources
    • High-harmonic generation sources
    • X-ray laser sources
    • Compact Free-electron lasers
    • Inverse Compton scattering sources
    • High power laser beam diagnostics tools
    • Radio frequency cavities, and guns
    • Undulators and wigglers
    • Magnets and multiband achromats
    • Others
       
  2. Applications
    • EUV lithography and mask inspection
    • Semiconductor wafer inspection and metrology
    • Phase contrast imaging and tomography
    • Medical and clinical imaging
    • Biological imaging
    • Macromolecular crystallography
    • Cultural heritage studies
    • Non-destructive testing
    • Ultrafast and dynamic studies
    • Wide field imaging
    • Others
       
  3. Enabling Technologies (such as optics, detectors, beam and wavefront diagnostic tools, and other instruments)
     
  4. Data acquisition, Management and Processing

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Plenary

Allen Weeks
ELI ERIC

Lighting the Way: Advances at ELI and Beyond

This talk will present recent advancements at the ELI Facilities since the beginning of the ELI User Programme in 2022. This includes primary laser systems and secondary sources serving various research fields, encompassing not only a broad range of physics, but also chemistry, biology and materials science. We will discuss the performance of this new generation of sources at ELI’s facilities, how they are providing unprecedented tools to tackle these challenges and new, disruptive technologies. Furthermore, the talk will venture into the future, outlining the visionary paths that laser and light source technology are set to embark upon. This includes an overview of the expected technical achievements in the next 24 months, as informed by contributions from various ELI facilities and partner facilities. These advances promise to further elevate our collective capability to probe the mysteries of the universe, from the smallest particles to the grandest cosmic phenomena.


Ulrich Schramm
Helmholtz-Zentrum Dresden-Rossendorf

Advancement of High Intensity Laser Driven Particle Accelerators to Application Readiness

Improved control of high intensity laser beam parameters on target recently enabled
proton energies beyond 100 MeV, dose-controlled in-vivo radiobiology experiments and
seeded FEL demonstration, which will be discussed jointly with the underlying physics.


Alexander Gaeta
Columbia University

Chip-Based Comb Spectroscopy

Recent advances in integrated photonics will allow for a new class of spectroscopic sources, such as optical frequency combs, which will enable high-precision spectroscopic instruments in highly robust, compact and portable platforms. 


Marla Dowell
National Institute of Standards and Technology

Advancing Metrology for Microelectronics: CHIPS Metrology Program

Under the CHIPS and Science Act of 2022, NIST is expanding its support of the microelectronics technology and manufacturing ecosystem by developing, advancing and deploying measurement technologies that are accurate, precise and fit-for-purpose.


 

Invited Speakers

Compact EUV & X-Ray Light Sources (EUVXRAY)
  • Félicie Albert, Lawrence Livermore National LaboratoryUnited States
    X-ray Light Sources Driven by Laser-plasma Acceleration for High Energy Density Science Applications  
     
  • Christopher Barty, University of California IrvineUnited States
    Compact Laser-Compton Light Sources and Applications  
     
  • John Byrd, Argonne National LaboratoryUnited States
    Enabling Technology for Compact XFELs  
     
  • Donald Gautier, Los Alamos National LaboratoryUnited States
    Gamma-Ray Tomography  
     
  • Bjorn Hegelich, Tau SystemsUnited States
    Laser-accelerator Driven Ultrahigh Brightness EUV/SRX Sources  
     
  • Erik Hosler, PsiQuantumUnited States
    The Last Light Source  
     
  • Hiroshi Kawata, High Energy Accelerator Research OrgJapan
    Accelerator development plan in KEK toward realization of High-power EUV-FEL for future lithography  
     
  • Oleg Khodykin, KLA CorporationUnited States
    Laser Driven Bright X-Ray Source from Cryogenic Xenon Target  
     
  • Frances Kraus , Princeton Plasma Physics LaboratoryUnited States
    Hot-Dense Plasma Physics via X-ray Spectroscopy of Intensely Driven Solids  
     
  • Nataliia Kuzkova, ARCNLNetherlands
    Unveiling the Atomic Dipole Phase: EUV Interferometry of High Harmonics Generated in Gases and Solids  
     
  • Jens Limpert, Friedrich-Schiller-Universität JenaGermany
    Laser Driven High Average Power HHG Driven EUV and Soft-X-ray Sources  
     
  • Luis Miaja Avila, NIST BoulderUnited States
    Atom Probe Tomography Using an Extreme Ultraviolet Pulsed Light Source  
     
  • Jan Rothhardt, Friedrich-Schiller-Universität JenaGermany
    Nanoscale Imaging with High Average Power High-Harmonic EUV and Soft-X-ray Sources  
     
  • Stephane Sebban, Laboratoire d'Optique AppliquéeFrance
    Plasma-based Soft X-ray Lasers  
     
  • Samuel Teitelbaum, Arizona State UniversityUnited States
    Optics and Laser Systems for the ASU Compact XFEL Project  

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Student Paper Award
 

The Optica Foundation Student Paper Competition

The congress recognizes the next generation of scientists through a student presentation competition. To qualify for an award, the paper must have been presented by an undergraduate or graduate student of an educational institution of collegiate grade.

The papers submitted to the competition were reviewed during the standard Technical Program Committee (TPC) review process and up to 4 finalists were selected. After the papers are presented, the Program Committee members will make their selections based on content quality, value to the technical community of interest and the students' presentation skills.

Congratulations to the Winners!
 
High-Intensity Lasers and High-Field Phenomena (HILAS)

Josephine Monzac, Laboratoire d’Optique Appliquée, France
Wednesday, March 13, 10:30 - 12:30
Significant Increase of Performances of a kHz Laser-Plasma Accelerator Using a H2 Plasma
 

Compact (EUV and X-Ray) Light Sources (EUVXRAY)

Wilhelm Focko Eschen, GSI GmbH, Friedrich Schiller University, Germany
Wednesday, March 13, 13:30 - 15:30
High-Speed, High-Resolution and Material-Specific Coherent EUV Imaging Using a High-Order Harmonic Source
 

Mid-Infrared Coherent Sources (MICS)

Marko Perestjuk, Institut des Nanotechnologies de Lyon, RMIT University, France
Tuesday, March 12, 16:30 - 17:30
Comparison of GST and Sb2S3 Phase Change Materials for Reconfigurable Integrated Mid-Infrared Supercontinuum Sources

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Image for keeping the session alive